Oil Free Dry Screw Vacuum Pump System Completely Excellent Energy Efficiency

Dry Screw Vacuum Pump (System) Completely Oil-Free Excellent Energy Efficiency

Introduction

A dry screw vacuum pump is an oil-free, positive displacement pump that utilizes a pair of precisely machined helical rotors (screws) that rotate at high speed in opposite directions within the pump chamber. The rotors do not make contact with each other or the pump housing, maintaining very close clearances. As the rotors turn, gas is drawn in through the inlet, trapped, compressed, and then transported axially to the outlet, thereby creating a vacuum at the inlet. Since the entire compression process requires no sealing or cooling by any working fluid (such as oil or water), it discharges clean, uncontaminated gas.

A "system" or "package" typically refers to a complete vacuum solution that integrates the dry screw vacuum pump as the main pump with components like booster pumps (e.g., Roots pumps), backing pumps (e.g., rotary vane pumps), piping, valves, cooling systems, and control systems.

Advantages

Completely Oil-Free: No oil in the pumping chamber, providing a clean vacuum environment and avoiding oil contamination of the process and product.

Low Maintenance Costs: No need to handle, replace, or dispose of expensive vacuum pump oil, reducing operating and maintenance costs.

High Reliability: Non-contact rotor design results in minimal wear and a long service life.

Excellent Energy Efficiency: Often equipped with Variable Frequency Drive (VFD) to adjust speed and power according to actual process demands, leading to significant energy savings.

Strong Water Vapor Handling Capability: Particularly suitable for handling condensable gases (like large amounts of water vapor), with less risk of emulsion or liquid slugging.

Environmentally Friendly: No oil mist emissions and no waste oil generation, complying with strict environmental regulations.

Broad Operating Pressure Range: A single stage can achieve a wide pumping speed curve from atmosphere to medium-high vacuum (e.g., 1 Pa).

Applications

Dry screw vacuum pumps are widely used in industries that require extremely clean vacuum environments due to their cleanliness, efficiency, and reliability.

• Semiconductor & Electronics: Wafer manufacturing, etching, CVD, PVD, ion implantation, LCD manufacturing.

• Photovoltaic (PV) Industry: Production processes for solar cells (silicon wafers), such as diffusion, PECVD.

• Chemical & Pharmaceutical: Distillation, drying, crystallization, solvent recovery, material transfer. Especially suitable for processes containing condensable vapors.

• Industrial Furnaces & Metallurgy: Vacuum furnaces, sintering furnaces, annealing furnaces, degassing, smelting.

• Food & Packaging: Vacuum packaging, freeze-drying (lyophilization), extraction.

• Research & Laboratory: Synchrotron radiation, particle accelerators, vacuum simulation chambers, analytical instruments.